Comparison ledger
Brooks 017-0146-01 Prealigner, OAI 806, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | 806OAI |
|---|---|---|
| OEM | Brooks | OAI |
| Category | Lithography | Lithography |
| Wafer size | — | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | OAI 806 |
| Specifications | ||
| Model | — | OAI 806 Mask Aligner[1] |
| Patterning substrate size | — | up to 6 inches[1] |
| Contact modes | — | soft, hard, and proximity contact modes[1] |
| Alignment accuracy | — | submicron[1] |
| UV source | — | collimated UV light source[1] |
| Workholding | — | vacuum chuck[1] |
| Optics | — | integrated microscope optics[1] |
| Stage | — | motorized stage[1] |
| Optional capability | — | backside alignment[1] |
| Substrate size | — | up to 6 inches[1] |
| Light source | — | collimated UV[1] |
| Backside alignment | — | optional[1] |
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