Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon NSR S 208 D KrF, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | NSR S 208 D KrFNikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2004 Introduction |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon NSR S 208 |
| Specifications | ||
| Configuration | — | 110nm[1] |
| Resolution | — | 110 nm[2] |
| Numerical aperture (NA) | — | 0.82[2] |
| Wafer size | — | 200/300 mm[2] |
| Reduction factor | — | 4x[2] |
| Exposure field | — | 26 x 33 mm[2] |
| Alignment accuracy | — | < 10 nm[2] |
| Model | — | NSR S 208 D[3] |
| Type | — | KrF scanner[3] |
| Exposure wavelength | — | 248/KrF[2] |
| Reduction | — | 4x[2] |
| Numerical aperture | — | 0.82[2] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →