Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon NSR S 204 B, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | NSR S 204 BNikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon NSR S 204 |
| Cited variants | — | |
| Specifications | ||
| Software Version | — | MCSV[3] |
| CIM | — | SECS[3] |
| Process | — | Photolithography[3] |
| Handler System | — | WL Type 3[3] |
| Factory Interface | — | Open Cassette[3] |
| Configuration | — | Cymer ELS 6400[1] |
| WL Size | — | 200MM[2] |
| Reticle Size | — | 6"[2] |
| RL Type | — | Standard (no smif)[2] |
| NEMA Box | — | 3P 200V[2] |
| Chamber | — | Sendai[2] |
| Lens Type | — | 4EN2GK[2] |
| Chemical Filter | — | Donaldson[2] |
| Online Interface | — | Tel ACT 8 Slow[2] |
| Wafer Size | — | 8 inch[3] |
| Laser | — | Cymer ELS 6400[1] |
| Vintage | — | 2001[1] |
| Variable NA | — | Yes[2] |
| HDD | — | Included[4] |
| Lens Data | — | Available[4] |
| Make | — | Nikon[3] |
| Model | — | NSR S 204 B[3] |
| Wafer Sizes | — | 8 inch[3] |
| Features | — | Chip (table) Leveling; In-Line Right; Tel Track; FIA; Pellicle Particle Detector; Variable NA; Microscope Theta; Signal Tower I/F; Online Interface: Tel ACT 8 Slow; MCSV; OCSV; GOCS; Bar Code Reader; MES Software; AIS; Signal Lamp Tower; RPF (random pattern filter)[2] |
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