Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon NSR 2205 i 14 E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | NSR 2205 i 14 ENikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon NSR 2205 i 14 E |
| Specifications | ||
| Category | — | Lithography[1] |
| Manufacturer | — | Nikon[2] |
| Model | — | NSR 2205 i 14 E[2] |
| Equipment Type | — | Stepper[2] |
| Vintage | — | 1999[2] |
| Wafer size | — | 200mm[1] |
| Throughput | — | ≧ 103 wafers/hour (200 mm wafer)[1] |
| Resolution | — | 0.35μm or better[1] |
| Numerical aperture | — | 0.63[1] |
| Exposure light source | — | i-line (365nm)[1] |
| Exposure field size | — | 22mm square to 17.9 (H) x 25.2 (V)mm[1] |
| Alignment system | — | LSA (standard), FIA (standard), LIA (optional)[1] |
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