Comparison ledger
Brooks 017-0146-01 Prealigner, Canon FPA 3000 i 5, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | FPA 3000 i 5Canon |
|---|---|---|
| OEM | Brooks | Canon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Canon FPA 3000 |
| Cited variants | — |
|
| Specifications | ||
| Wafer | — | Notch[1] |
| Transfer | — | L Type[1] |
| Reticle cassette | — | Canon's[1] |
| Reticle additional library | — | no[1] |
| PPC unit | — | no[1] |
| Software Version | — | V13.06B.06[1] |
| Configuration | — | Rasco TBW-CD-83 + Compact Chamber[2] |
| Wafer Size | — | 8 inch[1] |
| Wafer Alignment | — | Notch[1] |
| Transfer Type | — | L Type[1] |
| Additional Reticle Library | — | No[1] |
| Included Transfer Module | — | Rasco TBW-CD-83 + Compact Chamber (2000 Vintage)[2] |
| Additional Accessories | — | Rasco TBW-CD-83 + Compact Chamber 2000 Vintage[2] |
| Manufacturer | — | Canon[3] |
| Model | — | FPA 3000 i 5[3] |
| Equipment type | — | Stepper[3] |
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