Comparison ledger
Brooks 017-0024-01 Prealigner, SUSS MicroTec MA 6 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | MA 6 MaskSUSS MicroTec |
|---|---|---|
| OEM | Brooks | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | SUSS MicroTec MA 6 Mask |
| Specifications | ||
| Configuration | — | 1000 Watt Power Supply[1] |
| Voltage | — | 230 V[2] |
| UV lamp power supply | — | CIC1200/157308LS[3] |
| Wafer Sizes | — | 2, 3, 4, 5, 6, 12 inch[2] |
| Resolution | — | 1 Micron on 6 inch wafers[1] |
| Power Supply | — | 1000 Watt[1] |
| Illumination | — | IR Back Side Illumination[1] |
| Microscope | — | Split Field Microscope with 6 Objectives[1] |
| Alignment | — | Infrared Alignment[2] |
| Topside Alignment Objectives | — | MplanFL N 5x/0.15, MplanFL N 10x/0.30, LMPlanFL N 20x/0.40[3] |
| Air Chuck | — | 7-inch[3] |
| Voltage / Frequency | — | 200-240V, 50/60Hz[3] |
| Make | — | SUSS[4] |
| Model | — | MA 6[4] |
| Product Details | — | up to 6" - 50/60 Hz - 230 V - HDD - Software - with Infrared Alignment - No BSA 2001 Vintage[2] |
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