Comparison ledger
Brooks 017-0024-01 Prealigner, Nikon NSR S 210 D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | NSR S 210 DNikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | Nikon NSR |
| Specifications | ||
| Resolution | — | 110nm[1] |
| Manufacturer | — | Nikon[1] |
| Tool type | — | Scanner[1] |
| Light-source product group | — | Deep UV[2] |
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