Comparison ledger
Brooks 017-0024-01 Prealigner, EV Group 6200 NT Semi Automated Bottom Side Alignment, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | |
|---|---|---|
| OEM | Brooks | EV Group |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | EV Group 6200 |
| Specifications | ||
| Configuration | — | Double side[1] |
| Exposure Modes | — | Hard, Soft, & Vacuum Contact[1] |
| Separation Distance | — | 0 - 300 µm adjustable via software[1] |
| Wafer Thickness | — | 0.1 - 10 mm (For Top Side)[1] |
| OEM | — | EV Group[1] |
| Model | — | 6200 NT Semi Automated Bottom Side Alignment[1] |
| Tool type | — | Mask alignment system[2] |
| Lithography use | — | Optical double-side lithography[2] |
| Wafer/substrate size | — | Up to 200 mm / 8 inch[2] |
| Bottom side alignment | — | ≤ ± 1.0 µm[2] |
| Top side alignment | — | ≤ ± 0.5 µm[2] |
| Exposure source | — | Mercury light source / UV LED light source[2] |
| Exposure setup | — | Vacuum contact / hard contact / soft contact / proximity mode / flex mode[2] |
| Throughput | — | Up to 180 WPH in first print mode or up to 140 WPH in automatic alignment mode[2] |
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