Waferpedia

Comparison ledger

101-149-053 Gold Boosterversus40 NT

Branson 101-149-053 Gold Booster, EV Group 40 NT, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
40 NTEV Group
OEMBransonEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBranson 101-149-053 Gold BoosterEV Group 40
Specifications
Configuration1:1.5[1]50/60 Hz[4]
ManufacturerBranson[2]—
Model101-149-053[2]—
TypeGold Booster[2]—
Operating frequency20 kHz[3]—
Gain1:1.5[2]—
Mounting thread1/2-20[3]—
Length5.4 in[3]—
Gain ratio1:1.5[2]—
Voltage—230 V[4]
Product type—Automated Measurement System[5]
Tool format—stand-alone tool[5]
Integrated module—AVM (HVM-integrated module)[5]
Measurement scope—lithography-relevant parameters and bond alignment accuracy[5]
Measurement methods—critical dimension measurement, die-to-die alignment verification, multi-layer thickness measurement[5]
Application examples—nanoimprint lithography and wafer-to-wafer bonding[5]
Verification capability—100 nm bond overlay accuracy of EVG's GEMINI FB automated fusion bonding system[5]
Microscope configuration—top- to bottom-side microscope[5]
Software—PC-based measurement and pattern recognition software[5]
Throughput support—specialized calibration routine[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]nextdayautomation.comnextdayautomation.com
  4. [4]inventory listing
  5. [5]evgroup.comevgroup.com