Comparison ledger
Blue M 0 V 500, Mattson SHS 2800 RTA, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 V 500Blue M | SHS 2800 RTAMattson |
|---|---|---|
| OEM | Blue M | Mattson |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 V 500 | Mattson SHS 2800 RTA |
| Specifications | ||
| Configuration | — | Front End[1] |
| Process | — | Oxid (BPSG + RTP)[1] |
| Voltage | — | 380 V, 63.0 A, 50/60 Hz, 3 Phase[1] |
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