Waferpedia

Comparison ledger

0 V 500versus2043MK5-VR

Blue M 0 V 500, Heller 2043MK5-VR, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
OEMBlue MHeller
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 V 500Heller 2043MK5-VR
Specifications
Oven length—680 cm[1]
Process gas options—Air, Nitrogen, Formic Acid, forming gas[1]
Heated zones—Convection: 10 Top / 10 Bottom; IR: 3 Top[1]
Heated length (convection/total)—327 cm / 430 cm[1]
Cool zones—3 Top (Bottom Option)[1]
Max working temperature (convection / IR)—Standard: 350°C / 400°C; Option: 400°C / 480°C[1]
Min vacuum—Standard: 10 Torr; Option: <10 Torr[1]
Max board size—500 mm (L) x 450 mm (W) x 29 mm (H)[1]
Cleanroom option—Down to Class 1000[1]
Heated zones (convection)—10 top / 10 bottom[1]
Heated zones (IR)—3 top[1]
Heated length (convection)—327 cm[1]
Heated length (total)—430 cm[1]
Cooling rate—>3°C/sec[1]
Max working temperature (convection / IR) standard—350°C / 400°C[1]
Max working temperature (convection / IR) option—400°C / 480°C[1]
Min vacuum standard—10 Torr[1]
Min vacuum option—<10 Torr[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org