Waferpedia

Comparison ledger

0 500versusIGF-6680E-MP

Blue M 0 500, Blue M IGF-6680E-MP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
OEMBlue MBlue M
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500Blue M IGF-6680E-MP
Specifications
ManufacturerBlue M[1]—
Model0 500[1]IGF-6680E-MP[2]
Asset number139866[1]—
Last confirm dateSeptember 10, 2025[1]—
Equipment typeOven[1]—
Type—electric industrial furnace[2]
Controller—Pro-Master I microprocessor controller[2]
Temperature monitoring—two thermocouples, one for the controller and one for the over temperature alarm[2]
Over temperature alarm setpoint—593 C[2]
Available gas input—N2[2]
Chamber atmosphere—inert gas atmosphere; inert or forming gas ambient by request[2]
Chamber venting—vented to the chemical hood exhaust system[2]
Location—cleanroom, packaging bay[2]
Training—3 sessions (2 trainings and a checkout session)[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]ncf.uic.eduncf.uic.edu