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NV GSD 200versus160 XP Ion

Axcelis NV GSD 200, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
NV GSD 200Axcelis
160 XP IonVarian
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis NV GSD 200Varian 160 XP Ion
Specifications
Voltage208 V[1]—
Phase3 phase[1]—
Configuration50/60 Hz[1]150mm High Current IMP[2]
Power35 kVa[1]—
Output160 kVe[1]—
Current20 ma[1]—
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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com