Comparison ledger
Axcelis 9355 UPS, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 9355 UPSAxcelis | |
|---|---|---|
| OEM | Axcelis | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis 9355 UPS | KLA 0035235-003 MMD Head |
| Cited variants |
| — |
| Specifications | ||
| Power | 15kVA/ 13.5kW[2] | — |
| Configuration | Defective batteries[2] | TSTD PCB ASSY, MMD MEAS HEAD[5] |
| Make | Axcelis[2] | KLA[5] |
| Model | 9355[2] | 0035235-003[5] |
| Product type | AC Back-up Power (UPS)[3] | — |
| Axcelis 9355 UPS rating | 15 kVA / 13.5 kW[2] | — |
| Power rating | 10-30 kVA[1] | — |
| Topology | Double conversion[4] | — |
| Voltage | 208/220/400/480/600 Vac three phase[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Output power factor | 0.9[1] | — |
| Input power factor | >0.99 typical (10-15 kVA); 0.99 typical (20-30 kVA)[4] | — |
| Input current distortion | 5% THD[4] | — |
| Internal batteries | Standard on all configurations[1] | — |
| Integrated power distribution module | On-board, plug-and-play power distribution module[1] | — |
| Maintenance bypass switch | Integrated maintenance bypass switch[1] | — |
| Paralleling | Up to four 9355 UPS units for capacity or redundancy using Powerware Hot Sync technology[1] | — |
| Scalability | 10 kVA and 20 kVA configurations can be upgraded to 15 kVA and 30 kVA, respectively, without additional hardware[1] | — |
| Battery type | 9 Ah, sealed, lead-acid, maintenance-free[4] | — |
| Battery management | Microprocessor-controlled ABM technology with three-stage charging[1] | — |
| Battery replacement | Field-replaceable batteries[1] | — |
| Display | Four-button graphical LCD[1] | — |
| Communication ports | (1) RS-232, (1) relay contact, (1) REPO, (2) environmental input[4] | — |
| Operating temperature | 50-104°F (10-40°C); 45°C with 7.5% derating[4] | — |
| Overload capability | 150% for 5 s / 125% for 1 min (online); 110% for 10 min[4] | — |
| Safety certifications | UL1778 5th Edition, CSA C22.2 No. 107.3-14, NOM-NYCE[4] | — |
| Emergency lighting models | UL924 Emergency Lighting models available[3] | — |
| OEM | Axcelis[2] | — |
| Phase | Three-phase[1] | — |
| Parallel capability | Up to four units can be paralleled[1] | — |
| Part Description | — | TSTD PCB ASSY, MMD MEAS HEAD[5] |
| Compatible System | — | KLA AIT-XP[5] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →