Comparison ledger
Axcelis 200 PCU, Varian Viision 80 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | Viision 80 IonVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Varian Viision 80 |
| Cited variants |
| |
| Specifications | ||
| P/N | SC 4840 A[4] | — |
| Frequency | 50 Hz[4] | 50/60 Hz[5] |
| Phase | 3 Phase[4] | 3 Phase[5] |
| Voltage | 400 V[4] | 208 V[3] |
| Configuration | — | 5 Wire[5] |
| Power | — | 35 kVA[3] |
| Electrical phase | — | 3 Phase[5] |
| Electrical wires | — | 5 Wire[5] |
| Voltage range | — | 200-230 Vac[6] |
| Maximum current | — | 50 A[3] |
| Full load current | — | 95 Amps[3] |
| High current | — | Yes[3] |
| Wiring | — | 5 Wire[5] |
| Current | — | 95 Amps[3] |
| Max Current | — | 50 A[3] |
| Type | — | High Current[3] |
| OEM | — | Varian[5] |
| Model | — | Viision 80[5] |
| Equipment type | — | Ion Implanter[5] |
| Electrical configuration | — | 3 Phase - 5 Wire - 208 Volts - 50/60 Hz[5] |
| Vintage | — | 1997[5] |
| Current class | — | High Current[3] |
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