Comparison ledger
Axcelis 200 PCU, Varian Kestrel II 750, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | Kestrel II 750Varian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | 10 Site Disk, 10 Wafer per Batch |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Varian Kestrel II 750 |
| Cited variants | — | |
| Specifications | ||
| P/N | SC 4840 A[3] | — |
| Frequency | 50 Hz[3] | — |
| Phase | 3 Phase[3] | — |
| Voltage | 400 V[3] | 30 kV Terminal PS[5] |
| Configuration | — | High current[4] |
| Energy Range | — | 10 - 3750 kV[5] |
| Wafer size | — | 10 Site Disk, 10 Wafer per Batch[6] |
| Wafer Size | — | 8 inch[4] |
| Batch Size | — | 10 Wafers per Batch[5] |
| Disk Sites | — | 10 Site Disk[5] |
| Gas Modules | — | 4 Gas Modules[5] |
| Gases | — | Argon (factory inlet), PH3 SDS, AsH3 SDS, BF3 SDS[5] |
| Automatic Handling | — | Yes[5] |
| Software Version | — | 6.41[6] |
| High Current | — | Yes[6] |
| Power Supply Interface (PSI) Controller | — | Included[6] |
| Source Vacuum Controller | — | Included[6] |
| Manipulator Controller | — | Included[6] |
| 30 kV Terminal PS | — | Included[6] |
| 60 kV Tube Lens PS | — | Included[6] |
| Category | — | Ion Implantation[6] |
| Handling system | — | Automatic Handling system[5] |
| Gas box | — | Fully Automated Gas Box, 4 Gas Modules[5] |
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