Comparison ledger
Axcelis 200 PCU, Sumitomo SEN NV GSD HE Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | SEN NV GSD HE IonSumitomo |
|---|---|---|
| OEM | Axcelis | Sumitomo |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Sumitomo SEN |
| Cited variants | — | |
| Specifications | ||
| P/N | SC 4840 A[3] | — |
| Frequency | 50 Hz[3] | 60 Hz[4] |
| Phase | 3 Phase[3] | 3 Phase[4] |
| Voltage | 400 V[3] | 480 V[4] |
| Power | — | 82 kVA[4] |
| Full Load Current | — | 99 A[4] |
| Input Breaker | — | 150 A[4] |
| Largest Load | — | 99 A[4] |
| Max Interrupt Capacity | — | 14 kA[4] |
| Configuration | — | 200 Volt[5] |
| Make | — | Sumitomo / SEN[4] |
| Model | — | NV GSD HE[4] |
| Wafer Sizes | — | 6 inch[5] |
| Vintage | — | 2000 Vintage[5] |
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