Comparison ledger
Axcelis 200 ACU, Tokyo Electron SCCM Shin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | SCCM ShinTokyo Electron |
|---|---|---|
| OEM | Axcelis | Tokyo Electron |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Tokyo Electron SCCM Shin |
| Specifications | ||
| Configuration | Parts Machine[1] | — |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | SCCM Shin[5] |
| Tool type | Asher[1] | TSP-30555SSS[7] |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| OEM | — | Tokyo Electron[5] |
| Category | — | Etch[6] |
| Vintage | — | 2005[5] |
| Description | — | Oxide etcher with qty 3 chambers[7] |
| Version | — | 300 mm[7] |
| Load ports | — | 3[7] |
| Etch process chambers | — | 3[7] |
| RF generator (top) | — | Daihen AGA-50B 60 MHz 5 kW[7] |
| RF generator (bottom) | — | Daihen WGA-50E 2 MHz 5 kW[7] |
| Other chamber component | — | Daihen DGP-120A2[7] |
| Gate valves | — | Vat gate valves[7] |
| Vacuum pumps | — | Shimadzu turbo pumps[7] |
| DC power supplies | — | Kyosan DC power supplies[7] |
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