Waferpedia

Comparison ledger

200 ACUversusScepter SCE A 311

Axcelis 200 ACU, Semitool Scepter SCE A 311, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
200 ACUAxcelis
OEMAxcelisSemitool
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis NV GSD 200Semitool Scepter SCE A 311
Specifications
ConfigurationParts Machine[1]—
ManufacturerAxcelis[1]—
Model200 ACU[1]Scepter SCE A 311[5]
Tool typeAsher[1]—
Wafer size200mm[3]8 inch[5]
Serial numberAU6A356AH[3]G191108[7]
Computer systemM 200 PC, M 200[4]—
Part numberSC 4572 A[4]—
Volts208[4]—
Amps30[4]—
Equipment typeAsher[1]Wet Etcher[5]
Wafer configuration8 inch[2]—
OEM—Semitool[5]
Description—Wet Etcher – Acid Spray[6]
Version—200mm[6]
Vintage—2001[5]
Date of manufacture—2001[7]
Software revision—SAAB 3.1[7]
Location—Nijmegen[7]
Condition—As Is[7]
Wafer Size—200 mm (8 inch)[5]
Process Type—Wet Etcher – Acid Spray[6]
Vintage (Year of Manufacture)—2001[5]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]wotol.comwotol.com
  4. [4]semistarcorp.comsemistarcorp.com
  5. [5]Equipment inventory listing
  6. [6]fabsurplus.comfabsurplus.com
  7. [7]solutions-on-silicon.comsolutions-on-silicon.com