Comparison ledger
Axcelis 200 ACU, Lam Research SEZ SP 203 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | SEZ SP 203 SpinLam Research |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research SEZ SP 203 |
| Specifications | ||
| Configuration | Parts Machine[1] | 50/60 Hz[5] |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | SEZ SP 203 Spin[5] |
| Tool type | Asher[1] | Spin etcher[7] |
| Wafer size | 200mm[3] | 150mm[8] |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Voltage | — | 400 VAC[5] |
| Max. Current | — | 32 A[5] |
| Breaking Capacity | — | 10.000 AIC[5] |
| Power | — | 400V, 50 Hz, 3-Phase[6] |
| Phase | — | ENI VL-400 Phase Shift Controller[6] |
| Roughing Pump Code | — | A532-80-905[6] |
| OEM | — | Lam Research[7] |
| Category | — | Etch[7] |
| Vintage | — | 1999[8] |
| Process pump status | — | Process pump in one chemical cabinet (sub tool) has malfunction[5] |
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