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17099370 Outer strike plateversusExceed 3000 AH

Axcelis 17099370 Outer strike plate, Nissin Exceed 3000 AH, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMAxcelisNissin
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis 17099370 Outer strike plateNissin Exceed 3000 AH
Cited variants—
  • EXCEED3000AH-8C[1]
Specifications
ConfigurationUsed with Axcelis GSD 200[2]Medium current[3]
Type—medium current ion implanter[4]
Wafer size—6-inch wafers[4]
Process mode—nanometer-scale process modes[5]
Transport system—handles thin wafers and other various substrates[5]
Average autotune time—less than 2 minutes[5]
Beam angle feedback—horizontal and vertical beam angle feedback system with multiple Faraday cup system[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]nccavs-usergroups.avs.orgnccavs-usergroups.avs.org
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]nissin-ion.co.jpnissin-ion.co.jp