Comparison ledger
Axcelis 17099370 Outer strike plate, Axcelis VHE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 17099370 Outer strike plateAxcelis | VHEAxcelis |
|---|---|---|
| OEM | Axcelis | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | 8" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis 17099370 Outer strike plate | Axcelis VHE |
| Specifications | ||
| Configuration | Used with Axcelis GSD 200[1] | Full disk 17 wafers[2] |
| Wafer size | — | 8" wafer convertible[2] |
| Source | — | Bernas[2] |
| Extraction system | — | Triple axes[2] |
| Gases | — | Boron, Phosfine[2] |
| Max Implantation Energy | — | 5000 KeV[2] |
| Max Extraction Boltage | — | 90 KeV[2] |
| Orienter | — | Flat[2] |
| Make | — | Axcelis[2] |
| Model | — | VHE[2] |
| Wafer sizes | — | 6 inch[2] |
| Wafer convertible | — | 6 inch - 8 inch[2] |
| Full disk capacity | — | 17 wafers[2] |
| Wafer tilt | — | Included[2] |
| Max extraction voltage | — | 90 KeV[2] |
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