Comparison ledger
Axcelis 17099370 Outer strike plate, Axcelis NV 10 160 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 17099370 Outer strike plateAxcelis | NV 10 160 IonAxcelis |
|---|---|---|
| OEM | Axcelis | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | Multiple wafer disks |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis 17099370 Outer strike plate | Axcelis NV 10 160 Ion |
| Specifications | ||
| Configuration | Used with Axcelis GSD 200[1] | — |
| Manufacturer | Axcelis[2] | — |
| Model | 17099370 Outer strike plate[1] | — |
| Part number | OEM number 17099370[2] | — |
| Used with | Axcelis GSD 200[1] | — |
| Condition | NEW[2] | — |
| Max. Implant Energy | — | 160 keV[3] |
| Beam Current Range | — | 0.5-8 mA[3] |
| End Station | — | Manual Load[3] |
| Automatic Wafer Handling | — | No AT4[3] |
| Source | — | Standard[3] |
| Gas Box | — | 4 ELB Strings[3] |
| Vacuum | — | Dry Pump + Diffusion Pump[3] |
| Control System | — | Standard Console[3] |
| Wafer size | — | Multiple wafer disks[3] |
| Vacuum System | — | Dry Pump + Diffusion Pump[3] |
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