Waferpedia

Comparison ledger

Twinscan 1200 Bversus1000 Family

ASML Twinscan 1200 B, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1000 FamilyUltratech
OEMASMLUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyASML TwinscanUltratech 1000 Family
Specifications
Configurationwith Cymer XLA 160 laser[1]—
LaserCymer XLA 160[2]—
Tool type—Photolithography step-and-repeat 1X stepper[3]
Optical design—Wynne Dyson[3]
Magnification—1X[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]en.wikipedia.orgen.wikipedia.org