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Comparison ledger

VIISta HC Ion Implantversus160 XP Ion

Applied Materials VIISta HC Ion Implant, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
VIISta HC Ion ImplantApplied Materials
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials VIISTAVarian 160 XP Ion
Specifications
Configuration1 channel[1]150mm High Current IMP[2]
Channel count1 channel[1]—
Control typeSCCM type[1]—
Gas lines6 Gas lines[1]—
Vintage2005[1]—
OEM—Varian[3]
Model—160 XP Ion[3]
Category—Ion Implantation[2]
Tool type—ion implanter[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing