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Vantage Vulcan RTPversus1000 Hot Plate

Applied Materials Vantage Vulcan RTP, CEE 1000 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
Vantage Vulcan RTPApplied Materials
1000 Hot PlateCEE
OEMApplied MaterialsCEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials Vantage Vulcan RTPCEE 1000 Hot Plate
Cited variants
  • Vantage Vulcan RTP System (Rapid Thermal Process) - 2 chambers - SA RTP (Co/Ni)[1]
  • Vantage Vulcan RTP System (Rapid Thermal Process) - 2 chambers - Normal RTA/RTO[2]
  • Vantage Vulcan RTP System[1]
  • SA RTP (Co/Ni)[1]
  • Normal RTA/RTO[2]
—
Specifications
Configuration2 chambers[1]4"[3]
Number of Chambers2[1]—
Process TypeRapid Thermal Process[1]—
Type—Hot Plate[3]
Wafer Size—4 inch[3]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]inventory listing