Comparison ledger
Applied Materials DPS 2, Axcelis 200 ACU, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | DPS 2Applied Materials | 200 ACUAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials DPS | Axcelis NV GSD 200 |
| Cited variants |
| — |
| Specifications | ||
| Configuration | 3 Poly, 1 Axiom[2] | Parts Machine[5] |
| Manufacturer | Applied Materials[2] | Axcelis[5] |
| Model | DPS 2[2] | 200 ACU[5] |
| Category | Etch[4] | — |
| Wafer size | 12 inch[2] | 200mm[7] |
| Vintage | 2008[3] | — |
| Tool type | — | Asher[5] |
| Serial number | — | AU6A356AH[7] |
| Computer system | — | M 200 PC, M 200[8] |
| Part number | — | SC 4572 A[8] |
| Volts | — | 208[8] |
| Amps | — | 30[8] |
| Equipment type | — | Asher[5] |
| Wafer configuration | — | 8 inch[6] |
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