Waferpedia

Comparison ledger

Centura Enabler Oxideversus1512e

Applied Materials Centura Enabler Oxide, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Centura Enabler OxideApplied Materials
1512eTegal
OEMApplied MaterialsTegal
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials CenturaTegal 1512e
Cited variants
  • Centura Enabler (2008 Vintage)[1]
  • Centura Enabler (Server OS Type 2008 Vintage)[2]
—
Specifications
ConfigurationServer OS Type[2]—
OEMApplied Materials[4]—
ModelCentura Enabler[4]—
Equipment typeOxide Etcher[4]—
Server OS Type2008 Vintage[2]—
Tool type—Industrial RIE plasma etcher system[5]
Stated configuration—With modules assembly for CI-4222[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing
  5. [5]semistarcorp.comsemistarcorp.com