Waferpedia

Comparison ledger

0041-39086 ESC Partversus720 RIE

Applied Materials 0041-39086 ESC Part, Plasma-Therm 720 RIE, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
720 RIEPlasma-Therm
OEMApplied MaterialsPlasma-Therm
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Plasma-Therm 720 RIE
Specifications
Configuration—RF 5 S 500W, 13.56 MHz RF Generator[1]
Voltage—208V, 3 Ph, 60 Hz[1]

Plan your fab

Building a Etch process? Get a complete equipment list.

Open the fab equipment planner →
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing