Waferpedia

Comparison ledger

0041-39086 ESC PartversusPlasmalab 100 Plus ICP

Applied Materials 0041-39086 ESC Part, Oxford Instruments Plasmalab 100 Plus ICP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Plasmalab 100 Plus ICPOxford Instruments
OEMApplied MaterialsOxford Instruments
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Oxford Instruments Plasmalab 100 Plus ICP
Specifications
Tool type—ICP Etcher (Inductively Coupled Plasma)[1]
Make—Oxford[1]
Model—Plasmalab 100 Plus[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing