Comparison ledger
Applied Materials 0041-39086 ESC Part, Lam Research 9400, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0041-39086 ESC PartApplied Materials | 9400Lam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Lam Research 9400 |
| Specifications | ||
| OEM | — | Lam Research[1] |
| Model | — | TCP 9400[1] |
| Tool name | — | Lam Research TCP 9400 Poly Etcher[1] |
| Process category | — | Inductively Coupled Plasma Etching (ICP)[1] |
| Cleanliness group | — | Clean, Semiclean[1] |
| Use | — | for poly and Si etches[1] |
| Maximum etch depth | — | 3 um[1] |
| Process materials | — | Poly and Si[1] |
| Cleanliness | — | Clean, Semiclean[1] |
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