Waferpedia

Comparison ledger

0041-39086 ESC PartversuseMax CT Plus Dielectric

Applied Materials 0041-39086 ESC Part, Applied Materials eMax CT Plus Dielectric, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
eMax CT Plus DielectricApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Applied Materials eMax
Specifications
Configuration—Alcatel ATH 1600 M Turbo Pump[1]
Bias—13.5 MHz (Bias) & 2 MHz (LF Bias)[1]
LF Bias—Daihen RMN-50N1[1]
Source—Daihen AMN-30 H 60 MHz[1]
Gate Valve—Nor-Cal / NC-95-PP[1]
FIB—eFib, wFib[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing