Waferpedia

Comparison ledger

0041-39086 ESC PartversusCentura DPS+

Applied Materials 0041-39086 ESC Part, Applied Materials Centura DPS+, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Centura DPS+Applied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Applied Materials Centura
Cited variants—
Specifications
Configuration—Metal 2ch, ASP+ 2ch[2]
Wafer size—8 inch[2]
Vintage year—2000[2]
Chamber types—DPS+ ES DTCU and HR DTCU[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]inventory listing