Waferpedia

Comparison ledger

0041-39086 ESC PartversusCentura 5200 DPS Metal

Applied Materials 0041-39086 ESC Part, Applied Materials Centura 5200 DPS Metal, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Centura 5200 DPS MetalApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Applied Materials Centura 5200 DPS Metal
Cited variants—
  • Centura 5200 DPS+[1]
Specifications
Wafer size—6 inch[2]
Plasma source—Decoupled Plasma Source (DPS)[2]
Tool type—Metal Etcher[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]manufacturingtomorrow.commanufacturingtomorrow.com
  2. [2]Equipment inventory listing