Waferpedia

Comparison ledger

0041-26723 Bonded AssemblyversusSB 6 GEN 2

Applied Materials 0041-26723 Bonded Assembly, SUSS MicroTec SB 6 GEN 2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SB 6 GEN 2SUSS MicroTec
OEMApplied MaterialsSUSS MicroTec
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0041-26723 Bonded AssemblySUSS MicroTec SB 6 GEN 2
Specifications
Tool type—Substrate bonder[1]
Maximum wafer diameter—150 mm[1]
Substrate sizes—Pieces to 150 mm[1]
Minimum chamber vacuum—5 × 10-5 bar[1]
Maximum temperature—550 °C[1]
Maximum bonding force—20 kN[1]
Power supply for anodic bonding—2000 V, 60 mA[1]
Maximum thickness—9.99 mm[1]
Automation—Semi-automated[2]
Applications—MEMS, LED, packaging, 2.5D/3D integration[2]

Plan your fab

Building a Packaging & Bonding process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]nist.govnist.gov
  2. [2]capneteq.comcapneteq.com