Waferpedia

Comparison ledger

0041-26723 Bonded Assemblyversus850 Debonder

Applied Materials 0041-26723 Bonded Assembly, EV Group 850 Debonder, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
850 DebonderEV Group
OEMApplied MaterialsEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0041-26723 Bonded AssemblyEV Group 850
Specifications
Phase—3 Phase[1]
Configuration—50/60 Hz[1]
Manufacturer—EV Group[2]
Model—850 Debonder[3]
Model designation—EVG®850 DB Automated Debonding System[2]
Function—Fully automated debonder for the separation and cleaning of processed temporary bonding wafer stacks[2]
Wafer diameter—Up to 300 mm[2]
Wafer size—2, 3, 4, 5, 6, 8, 12 inch[3]
Electrical—3 Phase[1]
Electrical frequency—50/60 Hz[1]
Feature—Reliable handling of thinned, bowed and warped wafers with and without topography[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]evgroup.comevgroup.com
  3. [3]Equipment inventory listing