Comparison ledger
Applied Materials 0020 18698 Part, Temescal CV-6S, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0020 18698 PartApplied Materials | CV-6STemescal |
|---|---|---|
| OEM | Applied Materials | Temescal |
| Category | Deposition | Deposition |
| Wafer size | — | 4" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0020 18698 Part | Temescal CV-6S |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Dial Cover, Side Local Match, Hdpcvd, Ul[2] | — |
| Manufacturer | — | Temescal[3] |
| Description | — | Load Locked Metal Evaporator Dual Gun[3] |
| Model | — | CV-6S[3] |
| Power supply | — | 10 kV[3] |
| E-beam sources | — | 2 Temescal 4-pocket series 260 e-beam sources[3] |
| Base pressure | — | ~ 5e-7 ultimate base pressure[3] |
| Vacuum system | — | Cryo-pumped system[3] |
| Load-lock | — | Present for quick turn-around[3] |
| Vacuum sequencing | — | Automatic vacuum sequencing[3] |
| Beam sweep control | — | Temescal Super Sweep e-beam sweep control[3] |
| Thickness monitoring | — | Inficon IC/5 programmable crystal thickness monitoring system[3] |
| Sample size | — | 1 wafer up to 4" diameter[3] |
| Metals, front gun | — | Ti, Pt, Ni, Au[3] |
| Metals, rear gun | — | Pd, Al, Ag, Ge[3] |
| Power supply type | — | Constant voltage, 6 kW high frequency switching power supply[1] |
| Operating capability | — | Designed to power and control one or two electron beam sources simultaneously[1] |
| Voltage/current regulation | — | +/- 0.5%[1] |
| Included components | — | Power module, high-voltage/gun control unit, filament transformer, 20 ft. cable set, operator manual[1] |
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