Waferpedia

Comparison ledger

0020 18698 PartversusProducer GT DARC

Applied Materials 0020 18698 Part, Applied Materials Producer GT DARC, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18698 PartApplied Materials
Producer GT DARCApplied Materials
OEMApplied MaterialsApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18698 PartApplied Materials Producer
Specifications
ConfigurationDial Cover, Side Local Match, Hdpcvd, Ul[1]3 Channels[2]
Gas—SiH4, N2O, NH3[2]
FOUP Ports—4[2]
Number of channels—3[2]
Process gases—SiH4, N2O, NH3[2]
Number of FOUP ports—4[2]
Chiller model—SMC HRW008-H1S-DY-X007[2]
Power supply type 1—Advanced Energy Apex 3013 (x6)[2]
Power supply type 2—Advanced Energy /PDX 900 (x6)[2]
Power supply type 3—MKS Astron 2L (x6)[2]
Vintage—2016[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing