Waferpedia

Comparison ledger

0020 18455 PartversusConcept Two Speed NExT

Applied Materials 0020 18455 Part, Lam Research Concept Two Speed NExT, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
OEMApplied MaterialsLam Research
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartLam Research Concept Two
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[1]—
Wafer Shape—Notch[2]
SMIF Interface—Yes[2]
Cassette Loader—LPI 2200[2]
Loadlock Indexer Robot—Indexer II[2]
PEC slot—MPS with one cool station[2]
Main power distributer—PDP[2]
System Main Power—3¢5Wires 208V[2]
System UPS Power—Yes[2]
Loadlock Baratron Model—MKS[2]
Split Insert—Yes[2]
Slit Valve Type—SMC L-Motion[2]
TM Turbo Pump Model—Pfeiffer TC 400 E74[2]
TM Throttle Valve Model—MKS[2]
TM Baratron Model—MKS[2]
IOC Version—V 4.4[2]
TM Robot Type—Mag 7 with Center Finder[2]
TMRobot Blade—Metal[2]
Wafer sensor—Existence[2]
EMO's—Push Button/turn to release[2]
Front Monitor—15 inch[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing