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Comparison ledger

0020 18455 PartversusDesk II Gold

Applied Materials 0020 18455 Part, Denton Vacuum Desk II Gold, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
Desk II GoldDenton Vacuum
OEMApplied MaterialsDenton Vacuum
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartDenton Vacuum Desk
Cited variants—
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[2]leaking vacuum oil[3]
Input Voltage—120 VAC[4]
Input Current—10 A[4]
Process Gas—Argon (UHP-Plus grade; 99.9993% pure)[4]
Argon Line Pressure—7 psig at tank[4]
Chamber Pressure (Sputter Deposition)—~50 mTorr[4]
Sputter Current—~40 mA[4]
Gold Deposition Rate—~20 nm per 60 seconds[4]
Chamber Pressure (Etching)—~300 mTorr[4]
Pumping Type—Turbo-pumped (in TSC variant)[1]
Specimen Holder—Rotating/tilting[1]
Film Thickness Monitor—Included (in TSC variant)[1]
Target Material—Gold/palladium (standard), with spare gold and platinum[1]
Particle Sizing Range—1 nm to 5 microns[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]microscopy.beckman.illinois.edumicroscopy.beckman.illinois.edu
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]nanofab.ku.edunanofab.ku.edu