Waferpedia

Comparison ledger

0020 18455 PartversusEndura CL

Applied Materials 0020 18455 Part, Applied Materials Endura CL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
Endura CLApplied Materials
OEMApplied MaterialsApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartApplied Materials Endura
Cited variants—
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[4]Preclean[1]
Phase—3 Phase[5]
Voltage—400V[5]
Chamber E—Degas[5]
Chamber F—Degas[5]
SUB Rack—BULE Distribution Rack[5]
Chamber—D (PC-XT), 1 (IMP), 2/3 (TxZ)[6]
OEM—Applied Materials[1]
Model—Endura CL[1]
Equipment type—Chamber[1]
Chamber configuration—Preclean[1]
Vintage—2002[1]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]inventory listing