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Comparison ledger

0020 18455 PartversusEndura 2

Applied Materials 0020 18455 Part, Applied Materials Endura 2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
Endura 2Applied Materials
OEMApplied MaterialsApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartApplied Materials Endura
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[1]Liner / Barrier[2]
Software Version—2.10_692[4]
System Power Rating—208VAC/480VAC[4]
Loading Configuration—3 TDK Loadports[4]
Chamber 1—Impulse PVD[4]
Chamber 2—Impulse PVD[4]
Chamber 3—Impulse PVD[4]
Chamber E—DMD[4]
Chamber F—DMD[4]
Fi Robot—Yasakawa[6]
Wafer Carrier—5x4" Wafer pocket, 4" Tray[9]
SiC Tray—4", 6 hole, SiC Carrier (2 pc)[9]
Dry Pump—(2)[9]
Wafer Size—12 inch (300 mm)[2]
Category—PVD (Physical Vapor Deposition)[2]
Front Interface Version—5.3[4]
Mainframe—Endura II[4]
Chamber Configuration—3 Impulse PVD chambers (Chambers 1-3), 2 DMD chambers (Chambers E and F)[4]
Robot Type—XP[2]
Pump—Dedicated[2]

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Sources (9)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]inventory listing
  8. [8]inventory listing
  9. [9]inventory listing