Waferpedia

Comparison ledger

0020 17485 PartversusSME 200 J

Applied Materials 0020 17485 Part, Ulvac SME 200 J, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 17485 PartApplied Materials
OEMApplied MaterialsUlvac
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17485 PartUlvac SME 200 J
Specifications
ConfigurationStrap, RF Out 2 Balanced Coil Match, Hdp[1]Chamber Targets:[2]
PM2—platinum[2]
PM3—bst[2]
PM4—no chamber[2]
PM5—bst[2]
PM6—bst[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing