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Comparison ledger

0020 12458 PartversusTytan 1600 LPCVD

Applied Materials 0020 12458 Part, Tystar Tytan 1600 LPCVD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 12458 PartApplied Materials
OEMApplied MaterialsTystar
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 12458 PartTystar Tytan 1600 LPCVD
Cited variants—
  • Tytan 1600 LPCVD Carbon Nanotube Growth[1]
  • Mini Tytan 1600 Horizontal Furnace, 1 Stack, 150 mm, LPCVD[2]
Specifications
ConfigurationInsulator,Side Match,Hdp-Cvd Ultima Plus[3]with:[4]
Asset number146526[3]—
MakeApplied Materials[3]—
Model0020 12458[3]—
Process Temperature—up to 900° Celsius[1]
Low Pressure Range—50 Torr to 700 Torr[1]
Number of Gas Lines—5[1]
Electrical Configuration—208VAC, 60Hz, 3 Phase, 5-Wire[1]
Substrate Capacity (carbon nanotube variant)—up to 32 sheets of 200mm x 200mm substrates[1]
Furnace Configuration—Horizontal furnace[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]semistarcorp.comsemistarcorp.com
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]inventory listing
  4. [4]inventory listing