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0010-47763 ASSY ESC Bonded Monopolar Dual Heatedversus850 Wafer

Applied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual Heated, EV Group 850 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
850 WaferEV Group
OEMApplied MaterialsEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual HeatedEV Group 850
Specifications
ConfigurationRefurbished[1]50/60 Hz[2]
Power Consumption—28,9 kW[2]
Full Load Current Rating—89,1 A[2]
Largest Current Rating—28,9 A[2]
Power—5.5 kW[3]
Voltage—120/208 V, 3 Phase[3]
Manufacturer—EVG[2]
Model—850 Wafer[2]
Category—Packaging & Bonding[2]
Wafer sizes—2, 3, 4, 5, 6, 8, 12 inch[2]
Wafer size limit—up to 8 inch[2]
Frequency—50/60 Hz[2]
Vintage—2001[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing