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0010-22161 High EFF RF Matchversus253B-1-40-2

Applied Materials 0010-22161 High EFF RF Match, YES 253B-1-40-2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsYES
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FamilyApplied Materials 0010-22161 High EFF RF MatchYES 253B-1-40-2
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Product type—Exhaust throttle valve, butterfly valve[3]
Differential pressure across valve—1 atm. (15 psig) max.[3]
External leakage at shaft seal—1 x 10^-7 scc/sec He[3]
Materials exposed to process—316L SS, Viton (where Viton is used, other materials are available; consult factory)[3]
Shaft seal—Viton[3]
Resolution—Standard: 1/10,000; Fast Motor Option: 1/2800[3]
Speed (open to close)—Standard: 7.5 sec; Optional: < 2 sec[3]
Valve body operating temperature—0° to 90° C (32° to 194° F) max.[3]
Valve motor ambient operating temperature—0° to 70° C (32° to 158° F) max.[3]
Driver/gear assembly width—3.75" square (95 mm)[3]
Compatible controllers—Type 651, 652, 152G, or 252 (revision D or later) controllers[3]
Flange types available—ASA, NW Style ISO, KF Style ISO, CF, JIS[3]
Mounting—The valve may be mounted in any position by clamping its KF style flanges or through bolting its flanges to a pair of mating flanges.[3]
Electrical connector—15-pin Type "D" connector located at the end of the 6" pigtail cable[3]
Closed leak rates for sealing butterfly valves—Less than 1.3 x 10^-7 scc/sec when new[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]nanofab.utah.edunanofab.utah.edu