Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusPiXDRO LP 30 Inkjet

Applied Materials 0010-22161 High EFF RF Match, SUSS MicroTec PiXDRO LP 30 Inkjet, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
PiXDRO LP 30 InkjetSUSS MicroTec
OEMApplied MaterialsSUSS MicroTec
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchSUSS MicroTec PiXDRO
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—System accuracy < 5 µm (3σ)[3]
Temperature—Table temperature up to 50 °C[3]
System accuracy—< 5 µm (3σ)[3]
Printable area—327 × 227 mm (A4)[3]
Max substrate thickness—25 mm[3]
Table temperature—up to 50 °C[3]
Max motion speed—250 mm/s[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing