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0010-22161 High EFF RF MatchversusHiPace 800 + TC 400 Turbo

Applied Materials 0010-22161 High EFF RF Match, Pfeiffer HiPace 800 + TC 400 Turbo, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-22161 High EFF RF MatchApplied Materials
HiPace 800 + TC 400 TurboPfeiffer
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
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FamilyApplied Materials 0010-22161 High EFF RF MatchPfeiffer HiPace
Cited variants—
  • HiPace 800, DN 200 ISO-K, TC 400, 24 V DC[1]
  • HiPace 800, DN 200 ISO-K, TC 400, 48 V DC[1]
  • HiPace 800, DN 200 CF-F, TC 400, 24 V DC[1]
  • HiPace 800, DN 200 CF-F, TC 400, 48 V DC[1]
  • HiPace 800, DN 200 ISO-F, TC 400, 24 V DC[1]
  • HiPace 800, DN 200 ISO-F, TC 400, 48 V DC[1]
  • TC 400, standard[1]
  • TC 400 PB, Profibus[1]
  • TC 400 E74, according to Semi E74[1]
  • TC 400 DN, DeviceNet[1]
  • TC 400 EC, EtherCAT[1]
Specifications
MakeApplied Materials[2]—
Model0010-22161[2]—
DescriptionHTESC PH 1 REV A[3]—
ConditionUsed[3]—
Stock NumberBM6628[3]—
P/N—PM P 04 301[4]
Input—24V / 48V, 15A[4]
Output—0-48V, 12A, 0-1000Hz[4]
Pump type—Turbomolecular vacuum pump[1]
Product name—HiPace 800 Turbomolecular Vacuum Pump[1]
Drive unit—TC 400 electronic drive unit[1]
High vacuum flange variants—DN 200 ISO-K, DN 200 CF-F, DN 200 ISO-F[1]
Supply voltage variants—24 V DC or 48 V DC[1]
Drive unit input—24V / 48V, 15A[4]
Drive unit output—0-48V, 12A, 0-1000Hz[4]
Part number—PM P 04 301[4]
TC 400 drive unit variants—Standard, Profibus, Semi E74, DeviceNet, EtherCAT[1]
0010-22161 High EFF RF Match entryHiPace 800 + TC 400 Turbo entryAsk about these tools →Share experience with this comparison →
Sources (4)Every fact above is drawn from these public sources
  1. [1]pfeiffervacuum.compfeiffervacuum.com
  2. [2]Equipment inventory listing
  3. [3]tarasemi.comtarasemi.com
  4. [4]inventory listing