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0010-22161 High EFF RF MatchversusAdixen ADS 501

Applied Materials 0010-22161 High EFF RF Match, Pfeiffer Adixen ADS 501, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
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FamilyApplied Materials 0010-22161 High EFF RF MatchPfeiffer Adixen ADS 501
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Type—Dry pump[3]
Inlet—ISO100[3]
Exhaust—KF40[3]
Pumping speed (60 Hz)—300 CFM[3]
Ultimate pressure (60 Hz)—6 x 10^-4 Torr[3]
Weight—844 lbs[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]provac.comprovac.com