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0010-22161 High EFF RF MatchversusVMZ R 3020 CNC Video Measuring

Applied Materials 0010-22161 High EFF RF Match, Nikon VMZ R 3020 CNC Video Measuring, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsNikon
Category——
Wafer size——
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Introduced——
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FamilyApplied Materials 0010-22161 High EFF RF MatchNikon VMZ R 3020
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Stroke (X x Y x Z)—300 x 200 x 200 mm[3]
Configuration—Measurement Accuracy:[3]
Auto Focus—Laser AF, Image AF (* If Type A selected, Laser AF is optional)[3]
Illumination—Diascopic, Episcopic, 8-segment LED ring illumination (3 incident angles)[3]
CCD Camera—B&W 1/3 CCD·Color 1/3 CCD (Color: type 1, 2 and A only)[3]
Type 1—0.5 - 7.5x · 9.33 x 7 - 0.622 x 0.467 mm[3]
Type 2—1 - 15x · 4.67 x 3.5 - 0.311 x 0.233 mm[3]
Type 3—2 - 30x · 2.33 x 1.75 - 0.155 x 0.117 mm[3]
Type 4—4 - 60x · 1.17 x 0.875 - 0.07 x 0.068 mm[3]
Type TZ—1 - 120x · 4.67 x 3.5 - 0.039 x 0.029 mm[3]
Type A—0.35 - 3.5x · 13.3 x 10 - 1.33 x 1 mm[3]
Guaranteed Loading Capacity (Weight)—20 kg[3]
Power Source—AC100 - 240V, 50 / 60Hz[3]
Power Consumption—5-2.5A[3]
Measurement Accuracy (XY 1 axis)—1.2 + 4L / 1000μm[3]
Measurement Accuracy (XY 2 axis)—2.0 + 4L / 1000μm[3]
Measurement Accuracy (Z axis)—1.2 + 5L / 1000μm[3]
Magnification / Field of View - Type 1—0.5 - 7.5x · 9.33 x 7 - 0.622 x 0.467 mm[3]
Magnification / Field of View - Type 2—1 - 15x · 4.67 x 3.5 - 0.311 x 0.233 mm[3]
Magnification / Field of View - Type 3—2 - 30x · 2.33 x 1.75 - 0.155 x 0.117 mm[3]
Magnification / Field of View - Type 4—4 - 60x · 1.17 x 0.875 - 0.07 x 0.068 mm[3]
Magnification / Field of View - Type TZ—1 - 120x · 4.67 x 3.5 - 0.039 x 0.029 mm[3]
Magnification / Field of View - Type A—0.35 - 3.5x · 13.3 x 10 - 1.33 x 1 mm[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing